Optisches Strahlteil
Anmelder: ASML Netherlands B.V. 🇳🇱
Details
- Veröffentlichungs-Nr.
- EP4760770
- Anmeldetag
- 11. Dezember 2024
- Veröffentlichung
- 17. Juni 2026
- Rechtsraum
- EP
Abstract
An optical beam member is for a charged particle-optical device configured to direct a charged particle beam along a charged particle-optical axis of the charged particle-optical device and towards a sample location. The optical beam member comprises a plurality of emitter arrangements configured to emit respective optical beams towards the sample location. A first beam aperture is defined in the optical beam member for passage of the charged particle beam towards the sample location. The plurality of emitter arrangements are arranged adjacent the first beam aperture and are configured to emit the respective optical beams to form a combined optical beam towards the sample location.
Anmelder
- Firma
- ASML Netherlands B.V.
- Land
- 🇳🇱 Niederlande
Niederländisches Unternehmen, das Lithografiesysteme und weitere Anlagen für die Halbleiterfertigung entwickelt und herstellt, zentral für die Chipindustrie.
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ASML Netherlands B.V.