Optisches Strahlteil
Anmelder: ASML Netherlands B.V. 🇳🇱
Details
- Veröffentlichungs-Nr.
- EP4760771
- Anmeldetag
- 11. Dezember 2024
- Veröffentlichung
- 17. Juni 2026
- Rechtsraum
- EP
Abstract
An optical beam member is for a charged particle-optical device configured to direct a charged particle beam along a charged particle-optical axis of the charged particle-optical device and towards a sample location. The optical beam member comprises a plurality of emitter arrangements configured to emit respective optical beams that combine into a combined optical beam towards the sample location. The plurality of emitter arrangements are adjacent a first beam aperture defined in the optical beam member for passage of the charged particle beam towards the sample location. The optical beam member is configured such that at least one of phase and power of the respective optical beams is controllable.
Anmelder
- Firma
- ASML Netherlands B.V.
- Land
- 🇳🇱 Niederlande
Niederländisches Unternehmen, das Lithografiesysteme und weitere Anlagen für die Halbleiterfertigung entwickelt und herstellt, zentral für die Chipindustrie.
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ASML Netherlands B.V.