In eine Supraleitende Digitale Schaltung Integrierter Kondensator und Verfahren zu Seiner Herstellung
Anmelder: Imec VZW, IMEC USA NANOELECTRONICS DESIGN CENTER, Inc. 🇧🇪
Details
- Veröffentlichungs-Nr.
- EP4761553
- Anmeldetag
- 10. Dezember 2024
- Veröffentlichung
- 17. Juni 2026
- Rechtsraum
- EP
Abstract
The invention is related to a micro-electronic component comprising superconducting digital logic circuitry, including at least one capacitor that comprises a bottom and top electrode (6',8') formed of superconducting NbTiN, and a dielectric interlayer (7') formed of orthorhombic HZO. A method for producing the capacitor includes method steps for producing of NbTiN electrodes defined by atomic concentrations of its constituent elements which enable superconductivity as well as the formation of HZO in the orthorhombic phase that remains stable throughout the sequence of method steps for producing the capacitor. The invention thereby enables producing capacitors for integration in an SDL circuit, for example to be used for the power supply in the circuit, which exhibit superior electrical performance combined with advanced scalability to nanosized dimensions.
Anmelder
- Firmen
- Imec VZW
IMEC USA NANOELECTRONICS DESIGN CENTER, Inc. - Land
- 🇧🇪 Belgien
Imec ist ein belgisches Forschungszentrum mit Sitz in Leuven, das auf Nanoelektronik, Halbleitertechnologie und digitale Technologien spezialisiert ist.
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