Verfahren zur Herstellung einer Quantenvorrichtung

Details

Veröffentlichungs-Nr.

EP4764631

Anmeldetag

10. November 2025

Veröffentlichung

24. Juni 2026

Rechtsraum

EP

Abstract

A method of manufacturing a quantum device (100, 200) includes bonding a diamond substrate (30) including a color center (21) to a layer (32) provided on a support substrate (10), forming a first portion (40) including the color center, and a second portion (42) having an inclined surface (43) inclined with respect to a side wall (41) of the first portion by etching the diamond substrate after the bonding the diamond substrate, forming a metal film (45) on the inclined surface, and forming a first optical waveguide portion (20) by cutting the first portion at a first position farther from the layer than the color center by emitting a laser beam reflected by the metal film onto the side wall of the first portion.

Anmelder

Firma

FUJITSU LIMITED

Land

🇯🇵 Japan