Detektormodul
Anmelder: ASML Netherlands B.V. 🇳🇱
Details
- Veröffentlichungs-Nr.
- EP4765186
- Anmeldetag
- 18. Dezember 2024
- Veröffentlichung
- 24. Juni 2026
- Rechtsraum
- EP
- IPC
- H01J37/244
Abstract
A detector module configured to detect charged particles emitted by a sample, the detector module comprising a detector unit electrically coupled to a conversion unit; the detector unit comprising a detector substrate, comprising a detector element and a pre-amplifier circuit electrically connected to the detector element, the detector substrate comprising a first metal material for conducting signals in the detector substrate; the conversion unit comprising a conversion circuit and/or a data routing circuit, the conversion circuit and/or the data routing circuit integrated into a conversion substrate, the conversion substrate comprising a second metal material for conducting signals in the conversion substrate;wherein the first conducting metal material is different from the second conducting metal material.
Anmelder
- Firma
- ASML Netherlands B.V.
- Land
- 🇳🇱 Niederlande
Niederländisches Unternehmen, das Lithografiesysteme und weitere Anlagen für die Halbleiterfertigung entwickelt und herstellt, zentral für die Chipindustrie.
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ASML Netherlands B.V
ASML Netherlands B.V · Veldhoven