Elektronenstrahlformung für Energieanalysatoren

Details

Veröffentlichungs-Nr.

EP4765189

Anmeldetag

23. Dezember 2024

Veröffentlichung

24. Juni 2026

Rechtsraum

EP

IPC

H01J49/06, // H01J49/46

Abstract

The invention relates to an electron imaging apparatus (23) configured to be connected to an energy analyzer apparatus. The electron imaging apparatus comprises a receiving aperture (22), a control unit, and a field generating unit (65). The receiving aperture is configured for receiving electrons from a focal volume (200) which form an electron beam (25). The control unit is configured for providing a control signal to the field generating unit based on a desired height of the electron beam in an energy dispersive direction (y) of the energy analyzer apparatus at a proximal end (90) of the electron imaging apparatus and a desired angular distribution (αp) in the energy dispersive direction at the proximal end. The field generating unit is configured for generating at least one electrostatic, magnetic, or electrostatic and magnetic field based on the at least one control signal such that the at least one electrostatic, magnetic, or electrostatic and magnetic field is configured for exerting a force on the electrons of the electron beam in the energy dispersive direction such that a height of the electron beam in the energy dispersive direction at the proximal end corresponds to the desired height in the energy dispersive direction at the proximal end and an angular distribution in the energy dispersive direction at the proximal end corresponds to the desired angular distribution in the energy dispersive direction at the proximal end.

Anmelder

Firma

SPECS Surface Nano Analysis GmbH

Land

🇩🇪 Deutschland

Fachgebiete