Weiche Röntgenoptik mit Verbesserter Filterung

Details

Veröffentlichungs-Nr.

EP4769443

Anmeldetag

23. März 2021

Veröffentlichung

1. Juli 2026

Rechtsraum

EP

IPC

G21K1/10

Abstract

Optical elements that efficiently propagate x-ray radiation over a desired energy range and reject radiation outside the desired energy range are presented herein. In one aspect, one or more optical elements of an x-ray based system include an integrated optical filter including one or more material layers that absorb radiation having energy outside the desired energy band. In general, the integrated filter improves the optical performance of an x-ray based system by suppressing reflectivity within infrared (IR), visible (vis), ultraviolet (UV), extreme ultraviolet (EUV) portions of the spectrum, or any other undesired wavelength region. In a further aspect, one or more diffusion barrier layers prevent degradation of the integrated optical filter, prevent diffusion between the integrated optical filter and other material layers, or both. In some embodiments, the thickness of one or more material layers of an integrated optical filter vary over the spatial area of the filter.

Anmelder

Firma

KLA Corporation

Land

🇺🇸 USA

Fachgebiete