Verfahren zur Herstellung eines Josephson-Übergangselements und Josephson-Übergangselement

Details

Veröffentlichungs-Nr.

EP4770400

Anmeldetag

19. November 2025

Veröffentlichung

1. Juli 2026

Rechtsraum

EP

IPC

H10N60/01, H10N60/12

Abstract

A method of manufacturing a Josephson junction element includes forming a lower electrode (20) on a substrate (10) by using a superconducting material, depositing a first insulating film (30) on the substrate to cover the lower electrode, depositing a superconducting film on the first insulating film, and forming an upper electrode (40) by etching the superconducting film, the upper electrode covering an entire lower electrode in plan view and having an outer peripheral edge located outside an outer peripheral edge of the lower electrode.

Anmelder

Firma

FUJITSU LIMITED

Land

🇯🇵 Japan

Fachgebiete