Vorrichtung und Verfahren zur Entfernung von Oberflächenoxiden

Details

Veröffentlichungs-Nr.

EP4775342

Anmeldetag

17. Dezember 2025

Veröffentlichung

15. Juli 2026

Rechtsraum

EP

Abstract

An apparatus and process for removal of surface oxides includes an electron emitter device for emission of electrons for electron attachment to facilitate removal of oxides from solder bumps and/or solder caps on pillars of the surface of wafer(s) passing through an oven or furnace. The electron emitter device can include one or more modules having an electron emitting member with a plurality of projections positioned between different housing elements so that the projections extend through openings defined at an interface between the housing elements. Each module of the device can be releasably attached to a module support member for repair or replacement in a modular fashion via use of fasteners or other mechanism(s) (e.g. via bolts or screws, etc.) so that maintenance work can occur more quickly and efficiently to reduce downtime of equipment and improve operational flexibility.

Anmelder

Firma

Air Products and Chemicals, Inc.

Land

🇺🇸 USA