Spektroskopiegasmessung mit Photonischem Resonatorchip

Details

Veröffentlichungs-Nr.

EP4775961

Anmeldetag

2. Januar 2026

Veröffentlichung

15. Juli 2026

Rechtsraum

EP

IPC

G01N21/552, G02B6/12

Abstract

The present disclosure provides a photonic resonator chip comprising a substrate, a thermal silicon oxide layer disposed on the substrate, and a silicon nitride waveguide disposed on the thermal silicon oxide layer. The silicon nitride waveguide comprises a curved bus waveguide and a ring resonator adjacent to the curved bus waveguide, wherein the curved bus waveguide and ring resonator are arranged off-centric relative to each other. The photonic resonator chip further comprises a polysilicon shield disposed above the silicon nitride waveguide. The curved bus waveguide defines a first end corresponding to an input portion and a second end corresponding to an output portion, wherein the first and second ends are arranged at ninety degree orientation relative to each other. The photonic resonator chip may be incorporated into chip resonator gas cells and photonic resonator chip spectroscopy gas sensing devices for gas analysis applications.

Anmelder

Firma

Honeywell International Inc.

Land

🇺🇸 USA

Fachgebiete