Gassensor mit Verbesserter Ringresonator-Doppelfrequenzkammspektroskopie

Details

Veröffentlichungs-Nr.

EP4775962

Anmeldetag

2. Januar 2026

Veröffentlichung

15. Juli 2026

Rechtsraum

EP

Abstract

The present disclosure provides a photonic gas sensor chip comprising a substrate, a silicon oxide layer disposed on the substrate, a heating element disposed on the silicon oxide layer, a silicon oxide base disposed on the heating element, and a silicon nitride waveguide disposed on the silicon oxide base. The silicon nitride waveguide comprises an extended resonant ring waveguide comprising spiral waveguide sections. The spiral sections increase optical path length while maintaining compact footprint. The heating element enables thermal tuning of resonant frequency to match dual frequency comb spectroscopy repetition frequencies.

Anmelder

Firma

Honeywell International Inc.

Land

🇺🇸 USA