Röntgenanalysevorrichtung, Röntgenanalyseverfahren, Informationsverarbeitungsvorrichtung und Computerprogramm

Details

Veröffentlichungs-Nr.

EP4775970

Anmeldetag

27. September 2024

Veröffentlichung

3. April 2025

Rechtsraum

EP

IPC

G01N23/2206, G01N23/223

Abstract

There are provided an X-ray analysis device, an X-ray analysis method, an information processing device, and a computer program capable of individually measuring the amount of an element contained in a layer on a front surface side and a layer on a back surface side of a multilayer sample.An X-ray analysis device includes an irradiation unit that irradiates a sample, in which a plurality of layers are laminated, with X-rays such that the X-rays transmit through a first layer, an intermediate layer, and a second layer in this order; a fluorescent X-ray detector that detects fluorescent X-rays generated from the first layer or the second layer; a transmission X-ray detector that detects transmitted X-rays transmitted through the sample; and an analysis unit. The analysis unit calculates an amount of a specific element contained in one of the first layer and the second layer according to an intensity of the fluorescent X-rays having a predetermined first energy, calculates a total amount of the specific element contained in the first layer and the second layer according to an intensity of the transmitted X-rays having a predetermined second energy higher than the first energy, and calculates an amount of the specific element contained in the other of the first layer and the second layer.

Anmelder

Firma

HORIBA, Ltd.

Land

🇯🇵 Japan

Fachgebiete