Entladungsschadenminderungseinheit

Details

Veröffentlichungs-Nr.

EP4776323

Anmeldetag

14. Januar 2025

Veröffentlichung

15. Juli 2026

Rechtsraum

EP

IPC

H01J37/02, H01J37/26

Abstract

The present invention provides a discharge damage mitigation unit for use in a charged particle beam assessment apparatus for projecting a beam of charged particles towards a sample. The discharge damage mitigation unit is configured for use in a high electric field environment. The discharge damage mitigation unit comprises one or more extension elements configured to receive a discharge from a high electric field element at a different electrical potential in the high electric field environment. Each extension element is arranged outside of a beam path region encompassing a beam path of the beam of charged particles. Each extension element is supported on a component of the charged particle beam assessment apparatus, wherein a distal region of the extension element is configured to protrude from a surface of the component.

Anmelder

Firma

ASML Netherlands B.V.

Land

🇳🇱 Niederlande

Fachgebiete