Sensor und Verfahren zur Gleichzeitigen Messung der Dichte Geladener Teilchen und Molekularer Fragmente im Nichtgleichgewichtsgasplasma oder dessen Nachglühen

Details

Veröffentlichungs-Nr.

EP4776759

Anmeldetag

10. Dezember 2025

Veröffentlichung

15. Juli 2026

Rechtsraum

EP

IPC

H05H1/00, G01J3/02

Abstract

The present invention relates to devices and methods for the characterization of non-equilibrium gaseous plasma sustained in molecular gases. The methods enable simultaneous measurements of the density of both positively charged ions and molecular radicals. The sensor for a device that simultaneously measures the density of charged particles and molecular fragments in a non-equilibrium gaseous plasma or its afterglow comprises an optical fiber with at least two temperature-sensing segments exhibiting different coefficients for the surface association of neutral molecular radicals to form stable molecules. At least one temperature-sensing segment is covered or in contact with a material that exhibits a high coefficient for a surface association of atoms to parent molecules, and at least one sensing segment is not covered or in contact with any material that exhibits a high coefficient for a surface association of atoms to parent molecules. The measured difference in temperatures of at least two temperature-sensing segments is then correlated to the density/flux of charged particles and molecular fragments, and thus the density in the vicinity of the sensor.

Anmelder

Firmen

Univerza v Mariboru
Jozef Stefan Institute

Land

🇸🇮 Slowenien

Fachgebiete