Infrarot-Strahlungssensor mit Verbesserter Mechanischer Zuverlässigkeit

Details

Veröffentlichungs-Nr.

EP4779275

Anmeldetag

12. Januar 2026

Veröffentlichung

22. Juli 2026

Rechtsraum

EP

IPC

G01J5/02, G01J5/20

Abstract

Sensor (12), of the micro-electromechanical type, for detecting infrared, IR, radiation, comprising: a main body (32) with a buried cavity (34), and a frame portion (42) facing the cavity (34); a suspended mass (38) that is suspended in the cavity (34), has an active area in a first plane (XY) and comprises at least one TMOS (20) configured to detect IR radiation; and an elastic group (40) extending in the cavity (34) between the suspended mass (38) and the frame portion (42), to elastically couple the suspended mass (38) to the frame portion (42). The elastic group (40) comprises at least a first (41a), a second (41b), a third (41c) and a fourth (41d) spring, the springs (41a-41d) being of the folded type and being coupled to the suspended mass (38) at respective vertices of the suspended mass (38) in the first plane (XY), and each spring (41a-41d) has a cross-section with an area that depends on the active area of the respective suspended mass (38).

Anmelder

Firma

STMicroelectronics International N.V.

Land

🇨🇭 Schweiz

Fachgebiete