Partikelmessvorrichtung und Partikelmessverfahren

Details

Veröffentlichungs-Nr.

EP4779289

Anmeldetag

19. September 2024

Veröffentlichung

1. Mai 2025

Rechtsraum

EP

IPC

G01N15/0227

Abstract

An object of the invention is to provide a technique capable of measuring a particle size by using a non-linear detection signal from a Rayleigh scattering region to a Mie scattering region, in which calibration for reducing a tool-to-tool variation between a plurality of devices is simple. A particle measuring device according to the invention acquires a normalized signal S obtained by dividing a maximum value of an interference signal generated by interference between signal light and reference light by a reference value, and measures a size of a particle using a function describing a relationship between S and (d - d0), where d is the size of the particle and d0 is a measurement lower limit value of the size of the particle (see FIG. 2A).

Anmelder

Firma

Hitachi High-Tech Corporation

Land

🇯🇵 Japan

Fachgebiete