Verfahren zur Herstellung eines Beleuchtungsmodus, Verfahren zur Belichtung eines Substrats und Beleuchtungssystem

Details

Veröffentlichungs-Nr.

EP4779403

Anmeldetag

20. Januar 2025

Veröffentlichung

22. Juli 2026

Rechtsraum

EP

IPC

G03F7/00

Abstract

A method of forming an illumination mode using an illumination system comprising an array of individually controllable reflective elements arranged to direct portions of a radiation beam to desired locations in a pupil plane. The method comprises allocating different reflective elements of the array to direct radiation to different locations in the illumination mode by: determining a desired power spectral density function of radiation directed by the array of reflective elements to the illumination mode, the desired power spectral density function including a cutoff frequency; applying different phases to frequency components of the power spectral density function; transforming the power spectral density function into a spatial domain signal that varies as a function of positions of the reflective elements; and using the spatial domain signal to allocate reflective elements that direct radiation to different locations in the illumination mode.

Anmelder

Firma

ASML Netherlands B.V.

Land

🇳🇱 Niederlande

Fachgebiete