Vorrichtung für eine Lasererzeugte Plasmastrahlungsquelle

Details

Veröffentlichungs-Nr.

EP4782918

Anmeldetag

27. Januar 2025

Veröffentlichung

29. Juli 2026

Rechtsraum

EP

IPC

G03F7/00

Abstract

An apparatus for a laser-produced plasma radiation source comprises a generally tubular body. A radially inner surface of the generally tubular body is provided with a structure configured such that radiation received by said radially inner surface from a second axial end is at least partially directed back through the second axial end of the generally tubular body. The generally tubular body may comprise inner and outer tubular portions that define a fluid passageway which may be arranged such that an outlet of the fluid passageway directs fluid received at an inlet generally radially outwards from an axis of the generally tubular body. The apparatus may further comprise a collector provided with a concave reflective surface with a central aperture; and the generally tubular body may be disposed in the central aperture of the collector.

Anmelder

Firma

ASML Netherlands B.V.

Land

🇳🇱 Niederlande

Fachgebiete