Verfahren zur Bestimmung von Korrekturgewichten

Details

Veröffentlichungs-Nr.

EP4782924

Anmeldetag

28. Januar 2025

Veröffentlichung

29. Juli 2026

Rechtsraum

EP

IPC

G03F9/00

Abstract

The present invention provides a method for determining a set of correction weights to correct data relating to height measurements of a substrate comprising a plurality of fields to be exposed, the method comprising: obtaining height data relating to a plurality of illumination settings of measurement radiation used to perform a measurement, where each illumination setting comprises a different wavelength, polarization, angle of incidence, or any combination thereof; and determining at least one of: a) one or more correction weights to minimize variation of intrafield height data, and/or b) one or more correction weights such that the height data across the plurality of fields is largely equivalent.

Anmelder

Firma

ASML Netherlands B.V.

Land

🇳🇱 Niederlande

Fachgebiete