Systeme und Verfahren zur Proxybasierten Inspektion

Details

Veröffentlichungs-Nr.

EP4783113

Anmeldetag

17. Juni 2026

Veröffentlichung

29. Juli 2026

Rechtsraum

EP

IPC

G06T7/00

Abstract

Systems and methods for inspection, including analyzing layout data related to a sample to determine connectivity between features on the sample; determining that inspection should be performed on a first feature and a second feature based on the determined connectivity, the inspection comprising comparing a grey level value (GLV) of the first feature to a GLV of the second feature using a voltage contrast image of the first and second features; and determining, based on the comparison, whether a defect associated with the first feature and the second feature is present.

Anmelder

Firma

ASML Netherlands B.V.

Land

🇳🇱 Niederlande

Fachgebiete