Anordnung und Verfahren zur Bereitstellung eines Zielmaterialblocks

Details

Veröffentlichungs-Nr.

EP4783748

Anmeldetag

28. Januar 2025

Veröffentlichung

29. Juli 2026

Rechtsraum

EP

IPC

H05G2/00

Abstract

An assembly and a method for obtaining a target material ingot for use in a radiation source are disclosed. The assembly comprises a sealable chamber, a heating unit, and a receptacle. The chamber is configured to receive a target material catch bucket of a radiation source. The heating unit is configured to heat the target material contained within the received target material catch bucket to at least a melting temperature of a target material. The receptacle comprises at least one mould cavity arranged to receive a portion of a melted target material from the received target material catch bucket, and the receptacle having a contact surface defining the at least one mould cavity, wherein the contact surface is made of mould material that is inert and/or non-wetting against the target material.

Anmelder

Firma

ASML Netherlands B.V.

Land

🇳🇱 Niederlande

Fachgebiete