Verfahren zur Herstellung eines Zwei-Elektroden-Bauelements mit Supraleitenden Nbtin-Elektroden

Details

Veröffentlichungs-Nr.

EP4783809

Anmeldetag

28. Januar 2025

Veröffentlichung

29. Juli 2026

Rechtsraum

EP

IPC

H10N60/01, H10N60/80, H10D1/68

Abstract

Disclosed is a two-electrode device, such as a Josephson junction or a capacitor, comprising top and bottom electrodes (18, 27) formed of superconducting NbTiN which are separated by a non-superconducting interlayer (17), wherein the bottom electrode is larger than the interlayer and the top electrode. The electrodes and the interlayer are formed by two separate patterning steps and embedded in an enveloping dielectric material (25, 28, 35) that is subsequently planarized by a first CMP stopping on the upper surface of the top electrode (18), thereby forming a first planarized surface (36). Thereafter, a via opening (39) is formed, exposing the upper surface of the bottom electrode (27), filled with an electrically conductive material (40), and planarized by a second CMP. Wiring conductors (57, 58) are then formed on the second planarized surface (36').

Anmelder

Firmen

IMEC VZW
Imec USA Nanoelectronics Design Center

Land

🇧🇪 Belgien

Fachgebiete