Optische Anordnung

Details

Veröffentlichungs-Nr.

EP4787418

Anmeldetag

3. Februar 2025

Veröffentlichung

5. August 2026

Rechtsraum

EP

Abstract

The present disclosure describes an optical assembly for a charged particle-optical device configured to project one or more charged particle beams towards a sample, wherein the optical assembly comprises: a charged particle-optical element configured for passage of the one or more charged particle beams; detector element for detecting charged particles emitted from the sample in relation to the one or more charged particle beams; an optical element configured to project optical radiation towards the sample, wherein the optical element is configured to be positioned between the charged particle-optical element and the detector element and is further configured to be directly attached by adhesive to the charged particle-optical element or the detector element.

Anmelder

Firma

ASML Netherlands B.V.

Land

🇳🇱 Niederlande