Schnelle Modusumschaltung von Vorrichtungen mit Geladenen Teilchenstrahlen

Details

Veröffentlichungs-Nr.

EP4790395

Anmeldetag

9. Februar 2026

Veröffentlichung

12. August 2026

Rechtsraum

EP

IPC

G01N23/04

Abstract

A method, within a charged particle beam (CPB) microscope, of rapidly switching between a first imaging or data acquisition mode and a second imaging or data acquisition mode, comprises: activating a switchable electrostatic multipole of the CPB microscope to either cause or enable the CPB microscope to generate a first set of one or more images or data sets, the first set of one or more images or data sets comprising information relating to a sample in accordance with the first imaging or data acquisition mode; and de-activating the switchable electrostatic multipole to either cause or enable the CPB microscope to generate a second set of one or more images or data sets, the second set of one or more images or data sets comprising information relating to the sample in accordance with the second imaging or data acquisition mode.

Anmelder

Firma

FEI Company

Land

🇺🇸 USA

Fachgebiete