Verbindungswerkzeug
Anmelder: ASML Netherlands B.V. 🇳🇱
Details
- Veröffentlichungs-Nr.
- EP4790747
- Anmeldetag
- 11. Februar 2025
- Veröffentlichung
- 12. August 2026
- Rechtsraum
- EP
Abstract
A bonding tool is configured to bond a first substrate to a second substrate. The bonding tool comprises a measurement system. The measurement system is configured to measure a distance to a surface of at least one of the first substrate and the second substrate. The measurement system comprises at least one optical fiber and a radiation source. The at least one optical fiber has a distal end distanced from the surface so as to form an optical cavity of a Fabry-Pérot interferometer between the respective distal ends and the surface. The radiation source is configured to provide interrogation radiation of different wavelengths to the at least one optical fibers.
Anmelder
- Firma
- ASML Netherlands B.V.
- Land
- 🇳🇱 Niederlande
Niederländisches Unternehmen, das Lithografiesysteme und weitere Anlagen für die Halbleiterfertigung entwickelt und herstellt, zentral für die Chipindustrie.
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ASML Netherlands B.V
ASML Netherlands B.V · Veldhoven