Piezoaktordämpfung

Details

Veröffentlichungs-Nr.

EP4790887

Anmeldetag

10. Februar 2025

Veröffentlichung

12. August 2026

Rechtsraum

EP

IPC

H02N2/06, H02N2/02, G03F7/00

Abstract

A piezo motor system comprises a first piezo (P1), a second piezo (P2), and a controller (CON). The first piezo (P1) is configured to exert a first piezo force in a first direction. The second piezo (P2) is configured to exert a second piezo force in a second direction. The second direction is different from the first direction. One of the first piezo (P1) and the second piezo (P2) is configured to actuate the other one of the first piezo (P1) and the second piezo (P2) and the other one of the first piezo (P1) and the second piezo (P2) is configured to actuate the object (OBJ).The controller (CON) is configured to detect from the first piezo (P1) an electric signal representative of a force on the first piezo (P1) in the second direction, and apply damping control for the piezo motor system using the second piezo (P2) based on the detected electric signal.

Anmelder

Firma

ASML Netherlands B.V.

Land

🇳🇱 Niederlande

Fachgebiete