Mems-Vorrichtung mit einer Dämpfenden und Haltenden Multifunktionsstruktur

Details

Veröffentlichungs-Nr.

EP4793597

Anmeldetag

13. Februar 2026

Veröffentlichung

19. August 2026

Rechtsraum

EP

IPC

G01C19/5733, G01C19/5747

Abstract

A microelectromechanical device (1) includes: a support body (2); a movable mass (Y4), constrained to the support body (2) with a relative degree of freedom with respect to at least a first direction (Y) parallel to the support body (2), and comprising a frame portion (6) delimiting an opening (7); and a damping and stopping structure (5), anchored to the support body (2) and accommodated in the opening (7) of the movable mass (Y4). The movable mass (Y4) comprises a plurality of first elongated elements (65) defined by respective plates perpendicular to the first direction (Y) and extending in the opening (7) from the frame portion (6) in a comb-like configuration. The damping and stopping structure (5) comprises a plurality of second elongated elements (55) anchored to the support body (2), defined by respective plates perpendicular to the first direction (Y) and extending towards the frame portion (6) of the movable mass (Y4) in a comb-like configuration. The second elongated elements (55) are interdigitated with the first elongated elements (65). The damping and stopping structure (5) further comprises a plurality of stopping elements (56) configured to limit movements of the movable mass (Y4) along at least the first direction (Y).

Anmelder

Firma

STMicroelectronics International N.V.

Land

🇨🇭 Schweiz

Fachgebiete