Vorrichtung zum Genauen Bewegen eines Stempels auf einem Substrat

Details

Veröffentlichungs-Nr.

EP4793706

Anmeldetag

17. Februar 2026

Veröffentlichung

19. August 2026

Rechtsraum

EP

IPC

G03F9/00

Abstract

In an apparatus for accurately moving a stamp to a substrate, the stamp (3) is moved in the z-direction over a greater distance than in the x- and y-directions. The apparatus (1) comprises three plane mirrors (7), which are present perpendicular to the z-direction on the top side of the stamp (3), and three pairs (9) of further plane mirrors (11), with the two further plane mirrors (11) of each pair (9) at right angles to each other. The further plane mirrors (11) are elongated and extend in z-direction and are attached to the stamp (3) at three different locations. The apparatus (1) further comprises three interferometers (15) which are present at a distance above the stamp (3), and three further interferometers (19) which are present at a distance next to the stamp (3). Adjacent each further interferometer (19) a zero-shear mirror (23) is arranged.

Anmelder

Firma

MI-Partners BV

Land

🇳🇱 Niederlande

Fachgebiete