Mems-Vorrichtung mit einer Kappe und einer Signalverarbeitungsschaltung mit Geringen Abmessungen und Herstellungsverfahren dafür

Details

Veröffentlichungs-Nr.

EP4796493

Anmeldetag

6. Februar 2026

Veröffentlichung

26. August 2026

Rechtsraum

EP

IPC

B81C1/00

Abstract

Microelectromechanical -MEMS- device (35) formed by a first substrate (1'), having a first and a second main face (35A, 1B) and accommodating integrated electrical components (10) and external connection vias (33) extending through the first substrate (1'); a second substrate (2'), having a first and a second main face (2A, 25B) and accommodating conductive vias (17) extending between the first and second main surfaces of the second substrate, the first main face (25B) of the second substrate (2') coupled to the second main face (1B) of the first substrate (1') and the conductive vias (17) coupled to the external connection vias (33); and a third substrate (3'), having a main face (3A) and accommodating MEMS structures (19), the main face (3A) of the third substrate (3') coupled to the second main face (25B) of the second substrate (2'). The conductive vias (17) and the external connection vias (33) electrically couple the first face (35A) of the first substrate (1') to the MEMS structures (19).

Anmelder

Firma

STMicroelectronics International N.V.

Land

🇨🇭 Schweiz