Messvorrichtung, Messvorrichtung und Messverfahren

Details

Veröffentlichungs-Nr.

EP4796893

Anmeldetag

11. Februar 2026

Veröffentlichung

26. August 2026

Rechtsraum

EP

IPC

G01B7/06, G01B11/02

Abstract

A measurement device is the measurement device that measures a thickness of a covering layer included in a measurement target object with respect to a measurement axis direction, and that includes a first measurer which electromagnetically measures a first distance between the first end surface and a top surface of a base material with respect to the measurement axis direction, a second measurer which electromagnetically measures a second distance between the second end surface and the top surface of the base material with respect to the measurement axis direction, and a third measurer which optically measures a third distance between the third end surface and a top surface of the covering layer with respect to the measurement axis direction, wherein, in a direction perpendicular to the measurement axis direction, the first end portion, the second end portion, and the third end portion are arranged adjacent to each other.

Anmelder

Firma

Yokogawa Electric Corporation

Land

🇯🇵 Japan

Fachgebiete