Flexible Zuführstruktur, Positionierungsmodul und Lithografische Vorrichtung

Details

Veröffentlichungs-Nr.

EP4796997

Anmeldetag

20. Februar 2025

Veröffentlichung

26. August 2026

Rechtsraum

EP

IPC

G03F7/00, H01B7/04, H02G11/00

Abstract

The invention provides a flexible supply structure configured to transfer supplies between a first object and a second object, wherein the first object is movable with respect to the second object,wherein a first supply structure end of the flexible supply structure is connected to the first object and a second supply structure end of the flexible supply structure is connected to the second object,wherein the flexible supply structure is configured to bend about a bending axis,wherein the flexible supply structure comprises:a cable slab having one or more supply hoses and/or supply cables, the cable slab having a cable slab width and a cable slab thickness,at least one flexible shield element arranged along the cable slab to shield one or more sides of the cable slab, the shield element having a shield element thickness, wherein the shield element thickness is smaller than the cable slab thickness.

Anmelder

Firma

ASML Netherlands B.V.

Land

🇳🇱 Niederlande

Fachgebiete