System zur Übertragung einer Dünnschicht und Verfahren dafür

Details

Veröffentlichungs-Nr.

EP4797928

Anmeldetag

20. Februar 2025

Veröffentlichung

26. August 2026

Rechtsraum

EP

Abstract

The present invention relates to a transfer system (100) for transferring a thin film, e.g. a rGO flakes layer (10), to and on a wafer (12), comprising: a base plate (14), a wafer holder (16) arranged on the base plate (14); a carrier (18) for at least one thin film (10) to be transferred on the wafer (12); a pickup assembly (20) comprising: a pickup arm (22); a pickup head (24), configured to pick up a thin film (10) from the carrier (18) and deposit the thin film (10) on the wafer (12), and a motor, configured to determine movement of the pickup arm (22) between a lifted position and a lowered position, a movement transmission means (26), configured to move the base plate (14) to a desired position; a vacuum generating device, and a controller, the controller being configured to operate the vacuum generating device to generate a vacuum for holding the wafer (12) in place on the wafer holder (16). The invention further relates to a wiping system (300) for wiping a rim area of a thin film (210), e.g. a rGO flakes layer, deposited on a wafer.

Anmelder

Firma

INBRAIN Neuroelectronics SL

Land

🇪🇸 Spanien