Verfahren zur Regenerierung eines Organischen Lösungsmittels, Regenerator eines Organischen Lösungsmittels und Substratverarbeitungssystem

Details

Veröffentlichungs-Nr.

EP4799715

Anmeldetag

3. Februar 2026

Veröffentlichung

2. September 2026

Rechtsraum

EP

IPC

B01D61/36

Abstract

A method of regenerating an organic solvent includes: collecting a mixed liquid of an organic solvent and water in a collection tank, the organic solvent and the water being discharged from a substrate processing apparatus that processes a substrate; and performing a separation operation of circulating the mixed liquid through a circulation path formed by the collection tank and a circulation pipe in which a membrane separator is disposed, and reducing, using a decompression pump, a pressure in a second path partitioned by a separation membrane in the membrane separator from a first path which is inserted into the circulation pipe and through which the mixed liquid passes, the performing including controlling the decompression pump with a control set value based on a target concentration on a solvent concentration of the mixed liquid.

Anmelder

Firma

SCREEN Holdings Co., Ltd.

Land

🇯🇵 Japan

Fachgebiete