Regenerator für Organisches Lösungsmittel, Substratverarbeitungssystem und Verfahren zur Regenerierung eines Organischen Lösungsmittels
Anmelder: SCREEN Holdings Co., Ltd. 🇯🇵
Details
- Veröffentlichungs-Nr.
- EP4799716
- Anmeldetag
- 4. Februar 2026
- Veröffentlichung
- 2. September 2026
- Rechtsraum
- EP
- IPC
- B01D61/36
Abstract
An organic solvent regenerator includes a collection tank, an exhaust pipe, an exhaust valve, a circulator, a separation pipe, and a controller. An organic solvent and water flow into the collection tank through a collection pipe. The exhaust pipe in which the exhaust valve is disposed is connected to the collection tank. The controller opens the exhaust valve during at least a part of an inflow period in which at least one of the water and the organic solvent flows into the collection tank through the collection pipe, and closes the exhaust valve during at least a part of a separation operation period in which a separation operation of causing the circulator to circulate the mixed liquid and separating the water from the mixed liquid is performed.
Anmelder
- Firma
- SCREEN Holdings Co., Ltd.
- Land
- 🇯🇵 Japan
Japanischer Technologiekonzern. SCREEN Holdings stellt Fertigungsanlagen für die Halbleiterindustrie her, insbesondere Wafer-Reinigungs- und Beschichtungssysteme, sowie Druck- und Bildverarbeitungstechnik.
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