Gestänge für einen Aktuator

Details

Veröffentlichungs-Nr.

EP4799974

Anmeldetag

27. Februar 2025

Veröffentlichung

2. September 2026

Rechtsraum

EP

IPC

B81B3/00, G03F7/00, G02B26/08

Abstract

A linkage for an actuator is discloses, which comprises: a first portion; a second portion; and a hinge, wherein the first portion is connected to the second portion via the hinge. The hinge comprises at least one hinge portion. The or each hinge portion comprises a plurality of blade flexures extending from a first rigid body portion to a second rigid body portion. The plurality of blade flexures are generally mutually parallel. At least two of the plurality of blade flexures have different lengths in a direction extending between the first rigid body portion and the second rigid body portion. An actuator comprising such a linkage is also disclosed. The actuator may comprise a micro-electromechanical system (MEMS).

Anmelder

Firma

ASML Netherlands B.V.

Land

🇳🇱 Niederlande

Fachgebiete