Verfahren und Vorrichtung zur Analyse

Details

Veröffentlichungs-Nr.

EP4800380

Anmeldetag

16. Februar 2026

Veröffentlichung

2. September 2026

Rechtsraum

EP

IPC

G01N23/2209, G01N23/2251

Abstract

There is provided a method of analysis capable of correcting X-ray spectra precisely. The method of analysis uses an analysis apparatus (100) equipped with a plurality of wavelength-dispersive X-ray spectroscopy (WDS) spectrometers (50a-50e). The method starts with producing an X-ray spectrum by spectrally dispersing X-rays by the first spectrometer (50a). The X-rays are spectrally dispersed by the second spectrometer (50b) and X-rays from a corrective element are detected out of the dispersed X-rays to obtain information about timewise variations of the intensity of the X-rays from the corrective element. The intensity of X-rays from an element under analysis within the X-ray spectrum is corrected based on the information about the timewise variations of the intensity of the X-rays from the corrective element. In the step of correcting the intensity of the X-rays from the element under analysis, information about the intensity of the X-rays from the corrective element detected at the same timing as the X-rays from the element under analysis is obtained from the information about the timewise variations of the intensity of the X-rays from the corrective element. The intensity of the X-rays from the element under analysis is corrected based on the information about the intensity of the X-rays from the corrective element detected at the same timing as the X-rays from the element under analysis.

Anmelder

Firma

Jeol Ltd.

Land

🇯🇵 Japan

Fachgebiete