Flüssigkeitshandhabungsstruktur

Details

Veröffentlichungs-Nr.

EP4800478

Anmeldetag

27. Februar 2025

Veröffentlichung

2. September 2026

Rechtsraum

EP

IPC

G03F7/00

Abstract

A fluid handling structure configured to confine immersion liquid to an immersion space and comprising: a liquid supply opening to supply immersion liquid to the immersion space; a extraction opening outwards of the liquid supply opening to extract fluid from the immersion space; a gas supply opening outwards of the fluid extraction opening to supply a soluble gas to the vicinity of the immersion space; and a gas extraction opening outwards of the gas supply opening to extract gas from the vicinity of the immersion space; wherein the bottom surface has: an outer portion outward of the gas extraction opening, the outer portion facing the substrate in use and separated from the substrate by a first distance; and a barrier projecting toward the substrate by a second distance, the second distance being in the range of from 40% to 99% of the first distance.

Anmelder

Firma

ASML Netherlands B.V.

Land

🇳🇱 Niederlande

Fachgebiete