Substratträgeranordnung, Belichtungsvorrichtung mit einer Substratträgeranordnung und Verfahren

Details

Veröffentlichungs-Nr.

EP4800482

Anmeldetag

27. Februar 2025

Veröffentlichung

2. September 2026

Rechtsraum

EP

IPC

G03F7/20, H01L21/687

Abstract

The invention provides a substrate support assembly configured to support a substrate, the substrate support assembly comprising: a support table configured to support the substrate in a support plane, the support table having a top surface facing the substrate and a bottom surface opposite to the top surface, the support plane being parallel to the top surface of the support table, the support table comprising a plurality of bottom burls at the bottom surface, a support configured to clamp the substrate to the support table, wherein the support table is held within a recess provided in the support, the plurality of bottom burls facing a base of the recess, an actuator assembly comprising one or more actuators arranged in the recess and configured to move the support table relative to the support in a transverse direction with respect to the support plane.

Anmelder

Firma

ASML Netherlands B.V.

Land

🇳🇱 Niederlande

Fachgebiete