Analysegerät und Analyseverfahren

Details

Veröffentlichungs-Nr.

EP4800737

Anmeldetag

24. Februar 2026

Veröffentlichung

2. September 2026

Rechtsraum

EP

IPC

H01J37/22, H01J37/252

Abstract

An analyzer (100) includes: a specimen stage (20) that supports a specimen (S) and is capable of changing a position of the specimen (S); an electron optical system (10) that irradiates the specimen (S) with an electron beam (EB); a spectrometer (50) that separates and detects an X-ray with a specific wavelength from X-rays emitted from the specimen (S); an imaging device (60) that captures an optical image of the specimen (S); and a control unit (70) that adjusts a position of the specimen (S) so as to satisfy a focusing condition of the spectrometer (50). The imaging device (60) includes a variable focal length lens (66) that electrically changes a focal length, and the control unit (70) causes the specimen stage (20) to move the specimen (S) to a position satisfying the focusing condition based on a value of an electric signal supplied to the variable focal length lens (66) when a focus of the imaging device (60) has been adjusted to the specimen (S).

Anmelder

Firma

Jeol Ltd.

Land

🇯🇵 Japan

Fachgebiete