Substratverarbeitungsvorrichtung

Details

Veröffentlichungs-Nr.

EP4804781

Anmeldetag

5. Januar 2026

Veröffentlichung

9. September 2026

Rechtsraum

EP

Abstract

A substrate processing apparatus includes a substrate holder, nozzles, pipes, a nozzle holder, an arm, and an arm drive section. The nozzle holder holds any one nozzle of the nozzles. The arm is coupled to the nozzle holder. The arm drive section moves the arm. The arm drive section moves the nozzle held by the nozzle holder. Each of the nozzles includes a dispensing port and a connection portion. Each of the pipes includes a downstream end portion. Each of the pipes has flexibility. The nozzle held by the nozzle holder is defined as a selection nozzle. The arm drive section moves the dispensing port of the selection nozzle to a processing position. The selection nozzle is rotatable about a rotation axis with respect to the arm. The rotation axis passes through the dispensing port of the selection nozzle.

Anmelder

Firma

SCREEN Holdings Co., Ltd.

Land

🇯🇵 Japan