Vertikale Wärmebehandlungsvorrichtung und Fördervorrichtung dafür

Details

Veröffentlichungs-Nr.

EP4806831

Anmeldetag

29. November 2024

Veröffentlichung

19. Juni 2025

Rechtsraum

EP

Abstract

There are provided a vertical heat treatment apparatus and a conveying device therefor. The conveying device includes a main body, a transmission belt mechanism (400), and a stop mechanism (500), and the transmission belt mechanism (400) is used for transmission between a driving part and a driven part of the main body, and includes a transmission belt (401); the stop mechanism (500) includes a stop portion and an engagement assembly, the stop portion is fixedly connected to the driven part, and the engagement assembly includes a stop member, and abuts against the transmission belt (401) to disengage the stop member from the stop portion; when the transmission belt (401) breaks, the engagement assembly disengages from the transmission belt (401), and the stop member is in limit fit with the stop portion to stop the driven part from rotating. A stopping process of the conveying device does not need a detection device for signal detection, and does not need signal control for achieving stopping, so that reliability of the stopping process is improved, and cost of the conveying device is reduced.

Anmelder

Firma

Beijing NAURA Microelectronics Equipment Co., Ltd.

Land

🇨🇳 China