Faserwellenleiterkoppler und Herstellungsverfahren

Details

Veröffentlichungs-Nr.

EP4807415

Anmeldetag

23. Mai 2025

Veröffentlichung

16. September 2026

Rechtsraum

EP

IPC

G02B6/30

Abstract

The present invention provides a method for manufacturing comprising depositing a mask layer on a first surface on a front side of a substrate, wherein the mask layer has at least one opening mark; depositing an intermediate layer on the mask layer; bonding a first oxide layer on the intermediate layer; depositing a stress compensation layer on a second surface on a back side of the substrate, wherein at least one of a material and a thickness of the stress compensation layer are selected for reducing a bow of the substrate; depositing a waveguide structure on the first oxide layer, wherein the waveguide structure has a core layer and a cladding layer, wherein the core layer has a predetermined width and a predetermined thickness and is aligned with the opening mark; and anisotropic etching of a V-groove into the substrate at the opening marker of the mask layer such that when a fiber having a predetermined size is placed inside the V-groove, a core of the fiber is centered with respect to the core layer of the waveguide structure. Further, the present invention provides a corresponding fiber-waveguide coupler, a further method for manufacturing a fiber-waveguide coupler as well as a corresponding further fiber-waveguide coupler.

Anmelder

Firma

LiGenTec SA

Land

🇨🇭 Schweiz

Fachgebiete