Mikroskop und Beobachtungsverfahren

Details

Veröffentlichungs-Nr.

EP4807423

Anmeldetag

6. September 2024

Veröffentlichung

15. Mai 2025

Rechtsraum

EP

IPC

G02B21/06, G02B7/28

Abstract

An object of the invention is to provide a microscope with an autofocus mechanism that achieves both high-speed focus tracking and focus accuracy. The microscope according to the invention moves a position of a collimator lens such that light passing through an objective lens is focused on a surface of a cover slip, and detects reflected light from a sample as a focus error signal indicating a deviation amount of a focal point of the light passing through the objective lens from a focus target surface (see FIG. 1).

Anmelder

Firma

Hitachi High-Tech Corporation

Land

🇯🇵 Japan

Fachgebiete