Breitbandstrahlungserzeugung

Details

Veröffentlichungs-Nr.

EP4807440

Anmeldetag

14. März 2025

Veröffentlichung

16. September 2026

Rechtsraum

EP

IPC

G02F1/35, G02F1/365

Abstract

A broadband light source device comprising a radiation source for generating pulses of pump radiation, and a hollow-core photonic crystal fiber (HC-PCF) comprising a hollow core (HC). The HC-PCF comprises: a first region in which the HC has a first diameter; a second down-tapered region wherein a diameter of the HC reduces over its length from the first to a second diameter; a third region in which the HC has the second diameter; and a fourth up-tapered region, wherein a diameter of the HC increases over its length from the second to the first diameter. Parameter(s) of each of (i) a working medium disposed in the HC (ii) a pulse of pump radiation, and (iii) the regions, is selected such that the pulse is broadened in the first, second and third regions based on soliton-self compression, and further broadened in the fourth region based on self-steepening.

Anmelder

Firma

ASML Netherlands B.V.

Land

🇳🇱 Niederlande

Fachgebiete