Vorrichtung zur Elektrolytischen Schwefelsäurezufuhr
Anmelder: SCREEN Holdings Co., Ltd. 🇯🇵
Details
- Veröffentlichungs-Nr.
- EP4810665
- Anmeldetag
- 4. März 2026
- Veröffentlichung
- 23. September 2026
- Rechtsraum
- EP
Abstract
An electrolytic sulfuric acid supply apparatus includes a generation tank, a temperature control circulation pipe, and an electrolytic circulation pipe. The temperature control circulation pipe includes a common circulation pipe and a temperature control separate pipe. The electrolytic circulation pipe includes the common circulation pipe and an electrolytic separate pipe. A liquid feeder, a heater, and a first temperature sensor are arranged in the common circulation pipe. A temperature control circulation valve is disposed in the temperature control separate pipe. A filter, a cooler, an electrolytic cell, and a second temperature sensor are arranged in the electrolytic separate pipe. The electrolytic cell is disposed downstream of the cooler, and the second temperature sensor is disposed between the cooler and the electrolytic cell.
Anmelder
- Firma
- SCREEN Holdings Co., Ltd.
- Land
- 🇯🇵 Japan
Japanischer Technologiekonzern. SCREEN Holdings stellt Fertigungsanlagen für die Halbleiterindustrie her, insbesondere Wafer-Reinigungs- und Beschichtungssysteme, sowie Druck- und Bildverarbeitungstechnik.
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