Messvorrichtung

Details

Veröffentlichungs-Nr.

EP4810898

Anmeldetag

16. März 2026

Veröffentlichung

23. September 2026

Rechtsraum

EP

IPC

G01B11/06, G01N21/47

Abstract

Realized is a measurement that accommodates diverse repeating patterns of an object to be measured. A measurement apparatus (1) includes: a first light receiving head (22) which receives first reflected light that is first inspection light having been projected from vertically above and reflected by a sample (100); a second light receiving head (32) which receives second reflected light that is second inspection light having been projected from obliquely above and reflected by the sample; and a processor (60), the first light receiving head having a first shutter (23) capable of adjusting an amount of the first reflected light received, the second light receiving head having a second shutter (33) capable of adjusting an amount of the second reflected light received, and the processor controlling an opening and closing amount of each of the first shutter and the second shutter.

Anmelder

Firma

SCREEN Holdings Co., Ltd.

Land

🇯🇵 Japan

Fachgebiete