Systeme und Verfahren für Mehrkanalige Parallele Vorrichtungstests

Details

Veröffentlichungs-Nr.

EP4810967

Anmeldetag

17. März 2026

Veröffentlichung

23. September 2026

Rechtsraum

EP

Abstract

The disclosure describes systems and methods for parametric multi-channel testing of semiconductor devices. A system provides multiple test channels that include a pulse resource and a measuring resource with high-current (HC) and low-current (LC) switches coupled to a potential node connected to a testing pin. The pulse resource includes a first branch with a pulse generator, programmable-gain amplifier, switches for different branches or operations providing pulse current/voltage monitoring and a high-speed switch. A mode switch can be incorporated to selectively connect the potential node to the pulse resource for pulse testing, to the measuring resource with the HC switch closed for high-potential testing, or to the measuring resource with the LC switch closed for low-potential testing. Channels can further include direct digital synthesizers and processing circuits that generate calibrated test signals, perform analog-to-digital conversion, and execute frequency-domain transforms, with outputs using unique frequency/phase locked for coordinated, low-latency parallel operation.

Anmelder

Firma

Chroma ATE Inc.

Land

🇹🇼 Taiwan