Gepulste Strahlungsquelle und Beleuchtungsverfahren

Details

Veröffentlichungs-Nr.

EP4811036

Anmeldetag

18. März 2025

Veröffentlichung

23. September 2026

Rechtsraum

EP

IPC

G03F7/00, G01N21/95

Abstract

A metrology tool for measuring a target on a substrate, comprising a moveable substrate support configured to support the substrate and move the substrate at a first velocity. The metrology tool further comprises a radiation source configured to emit pulsed radiation to illuminate the target, and a detector configured to detect diffracted or reflected pulse radiation from the target to measure the target. The detector has a resolution such that a multiplication of the pulse length of the pulsed radiation and the first velocity is not greater than 2x the resolution.

Anmelder

Firma

ASML Netherlands B.V.

Land

🇳🇱 Niederlande

Fachgebiete