Substratverarbeitungsverfahren, Bildsammelverfahren, Substratverarbeitungsprogramm und Substratverarbeitungsvorrichtung

Details

Veröffentlichungs-Nr.

EP4811281

Anmeldetag

16. März 2026

Veröffentlichung

23. September 2026

Rechtsraum

EP

IPC

G06T7/00

Abstract

A processing liquid is supplied to a substrate by a processing nozzle. A processing image showing the substrate to which the processing liquid is supplied is generated by an imaging device. An input image receiver receives a first input image showing a state of the processing liquid on the substrate when an abnormality occurs in a substrate process. Based on the first input image, a shape model generator generates a shape model representing a three-dimensional shape of the processing liquid supplied to the substrate. A simulation executor simulates a transition of a state of the processing liquid in the shape model. An image generator generates an image showing a transition of the state of the processing liquid in a simulation. A collector collects the generated image as an abnormal image. An abnormality detector detects an abnormality in the substrate process based on a comparison between the processing image and the abnormal image.

Anmelder

Firma

SCREEN Holdings Co., Ltd.

Land

🇯🇵 Japan

Fachgebiete