Substratverarbeitungsvorrichtung und Verfahren zur Steuerung der Substratverarbeitungsvorrichtung

Details

Veröffentlichungs-Nr.

EP4812003

Anmeldetag

1. Dezember 2025

Veröffentlichung

23. September 2026

Rechtsraum

EP

IPC

H10P72/30

Abstract

A substrate processing apparatus includes a processing unit and a transporter. The transporter includes an end effector including a first hand and a second hand and a hand movement driver moving the end effector in a horizontal direction. The first elevating driver moves the first support member to each of a first processing height position where a first direct contact part of the first support member having contact with a lower surface of the substrate is located above the first hand, a second processing height position where the first direct contact part is located between the first hand and the second hand, and a third processing height position where the first direct contact part is located below the second hand.

Anmelder

Firma

SCREEN Holdings Co., Ltd.

Land

🇯🇵 Japan

Fachgebiete